Internal energy evaluation of sputtered molecule under size-selected argon cluster ion bombardment onto soft or hard sample
| Autor: | Toku, Taisei, Moritani, Kousuke, Tanaka, Yudai, Inui, Norio |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2024 553 |
| Databáze: | ScienceDirect |
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