Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry
| Autor: | Claessens, Niels, Delabie, Annelies, Vantomme, André, Vandervorst, Wilfried, Meersschaut, Johan |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B July 2023 540:174-181 |
| Databáze: | ScienceDirect |
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