Photoluminescent properties of the SiO2/Si system with ion-synthesized hexagonal silicon of the 9R-Si phase: Effect of post-implantation annealing
Autor: | Nikolskaya, A.A., Korolev, D.S., Trushin, V.N., Yunin, P.A., Mikhaylov, A.N., Belov, A.I., Konakov, A.A., Okulich, E.V., Pavlov, D.A., Tetelbaum, D.I. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B April 2023 537:60-64 |
Databáze: | ScienceDirect |
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