Simulation and experimental studies on the formation of high-power titanium ion beams for the synergy of ion implantation and energy impact on the surface
| Autor: | Ryabchikov, Alexander I., Tarakanov, Vladimir P., Korneva, Olga S., Sivin, Denis O., Gurulev, Alexandr V. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 December 2022 533:29-39 |
| Databáze: | ScienceDirect |
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