Effect of short-pulsed ion irradiation on the optical and electrical properties of titanium nitride films deposited by reactive magnetron sputtering

Autor: Konusov, F., Pavlov, S., Lauk, A., Kabyshev, A., Novikov, V., Gadirov, R., Tarbokov, V., Remnev, G.
Zdroj: In Nuclear Inst. and Methods in Physics Research, B 1 September 2022 526:51-59
Databáze: ScienceDirect
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