A comparison study of mechanical change and chemical disorder in 4H-SiC irradiated with Si5+ and He2+ at room temperature
| Autor: | He, Xiaoxun, Chen, Limin, Li, Junhan, Peng, Dingping, Zhang, Tongmin, Li, Jun, Liao, Qing, Pan, Qi, Xu, Shuai, Li, Bingsheng |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 February 2022 512:60-65 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect