Effect of high intensity short-pulsed ion irradiation on optical properties of multilayer coatings of aluminum and silicon nitrides
| Autor: | Konusov, F., Pavlov, S., Lauk, A., Tarbokov, V., Gadirov, R., Remnev, G. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 May 2021 494-495:1-9 |
| Databáze: | ScienceDirect |
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