Ion beam induced modification and nanostructures formation in thin SiC/Pd films on c-Si substrate
| Autor: | Masenya, M., Madhuku, M., Halindintwali, S., Mtshali, C. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 March 2021 491:34-37 |
| Databáze: | ScienceDirect |
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