RBS and NRA analysis for films with high growth rate prepared by atomic layer deposition
| Autor: | Xia, B., Ganem, J.J., Steydli, S., Tancrez, H., Vickridge, I. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 February 2021 489:20-25 |
| Databáze: | ScienceDirect |
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