Damage effects in 6H-SiC single crystals by Si&H dual ion irradiation: A combined Raman and XRD study

Autor: Wang, Xu, Ji, Yaqi, Zhang, Ming, Zhao, Yunbiao, Chen, Yuhan, Zhao, Ziqiang, Pan, Sheqi, Wang, Honglong
Zdroj: In Nuclear Inst. and Methods in Physics Research, B 15 December 2020 485:20-25
Databáze: ScienceDirect