Channeling in the helium ion microscope

Autor: Hijazi, Hussein, Li, Mengjun, Barbacci, Damon, Schultz, Albert, Thorpe, Ryan, Gustafsson, Torgny, Feldman, Leonard C.
Zdroj: In Nuclear Inst. and Methods in Physics Research, B 1 October 2019 456:92-96
Databáze: ScienceDirect