Helium ion beam induced electron emission from insulating silicon nitride films under charging conditions
| Autor: | Petrov, Yu.V., Anikeva, A.E., Vyvenko, O.F. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 June 2018 425:11-17 |
| Databáze: | ScienceDirect |
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