Size effect in AlN/SiN multilayered films irradiated with helium and argon ions
| Autor: | Uglov, V.V., Kvasov, N.T., Remnev, G.E., Shymanski, V.I., Korenevski, E.L., Zlotski, S.V., Abadias, G., O'Connel, J., van Vuuren, A. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 November 2018 435:228-235 |
| Databáze: | ScienceDirect |
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