Spectroscopy of highly charged ions for extreme ultraviolet lithography
| Autor: | O'Sullivan, Gerry, Dunne, Padraig, Higashiguchi, Takeshi, Kos, Domagoj, Maguire, Oisín, Miyazaki, Takanori, O'Reilly, Fergal, Sheil, John, Sokell, Emma, Kilbane, Deirdre |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 October 2017 408:3-8 |
| Databáze: | ScienceDirect |
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