Ion beam analysis and co-sputtering simulation (CO-SS) of bi-metal films produced by magnetron co-sputtering
Autor: | Cruz, J., Andrade, E., Muhl, S., Canto, C., de Lucio, O., Chávez, E., Rocha, M.F., Garcés-Medina, E. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 March 2016 371:268-272 |
Databáze: | ScienceDirect |
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