Characterization of crystal structure features of a SIMOX substrate
Autor: | Eidelman, K.B., Shcherbachev, K.D., Tabachkova, N.Yu., Podgornii, D.A., Mordkovich, V.N. |
---|---|
Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 December 2015 365 Part A:141-145 |
Databáze: | ScienceDirect |
Externí odkaz: |