Characterization of crystal structure features of a SIMOX substrate

Autor: Eidelman, K.B., Shcherbachev, K.D., Tabachkova, N.Yu., Podgornii, D.A., Mordkovich, V.N.
Zdroj: In Nuclear Inst. and Methods in Physics Research, B 15 December 2015 365 Part A:141-145
Databáze: ScienceDirect