Investigation of various phases of Fe–Si structures formed in Si by low energy Fe ion implantation
| Autor: | Lakshantha, Wickramaarachchige J., Dhoubhadel, Mangal S., Reinert, Tilo, McDaniel, Floyd D., Rout, Bibhudutta |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 December 2015 365 Part A:114-119 |
| Databáze: | ScienceDirect |
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