Near-surface recrystallization of the amorphous implanted layer of ion implanted 6H-SiC
| Autor: | Kuhudzai, R.J., van der Berg, N.G., Malherbe, J.B., Hlatshwayo, T.T., Theron, C.C., Buys, A.V., Botha, A.J., Wendler, E., Wesch, W. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 August 2014 332:251-256 |
| Databáze: | ScienceDirect |
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