Ultra-thin film and interface analysis of high-k dielectric materials employing Time-Of-Flight Medium Energy Ion Scattering (TOF-MEIS)
| Autor: | Primetzhofer, D., Dentoni Litta, E., Hallén, A., Linnarsson, M.K., Possnert, G. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 August 2014 332:212-215 |
| Databáze: | ScienceDirect |
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