Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment
Autor: | Umirzakov, B.E., Tashmukhamedova, D.A., Ruzibaeva, M.K., Djurabekova, F.G., Danaev, S.B. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 May 2014 326:322-325 |
Databáze: | ScienceDirect |
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