Investigation of change of the composition and structure of the CaF2/Si films surface at the low-energy bombardment

Autor: Umirzakov, B.E., Tashmukhamedova, D.A., Ruzibaeva, M.K., Djurabekova, F.G., Danaev, S.B.
Zdroj: In Nuclear Inst. and Methods in Physics Research, B 1 May 2014 326:322-325
Databáze: ScienceDirect