Ion beam sputtering of Ag – Angular and energetic distributions of sputtered and scattered particles
| Autor: | Feder, René, Bundesmann, Carsten, Neumann, Horst, Rauschenbach, Bernd |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 December 2013 316:198-204 |
| Databáze: | ScienceDirect |
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