Production and annealing behavior of lattice damage in energetic Kr and Ne-ion implanted 6H–SiC
| Autor: | Meng, Yancheng, Li, Jianjian, Xu, Chaoliang, Song, Yin, Fu, Xin, Ma, Tongda, Zhang, Chonghong |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 July 2013 307:552-557 |
| Databáze: | ScienceDirect |
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