Sputtering of a silicon surface: Preferential sputtering of surface impurities
| Autor: | Nietiadi, Maureen L., Rosandi, Yudi, Lorinčík, Jan, Urbassek, Herbert M. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 May 2013 303:205-208 |
| Databáze: | ScienceDirect |
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