Damage buildup and annealing characteristics in Be-implanted InAs0.93Sb0.07 film
| Autor: | Wang, Q.W., Sun, C.H., Hu, S.H., Wei, L.M., Wu, J., Sun, Y., Hu, G.J., Yu, G., Chen, X., Deng, H.Y., Dai, N. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 August 2012 285:11-17 |
| Databáze: | ScienceDirect |
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