An XPS study to investigate the dependence of carbon ion fluences in the formation of buried SiC
| Autor: | Poudel, P.R., Poudel, P.P., Rout, B., El Bouanani, M., McDaniel, F.D. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 July 2012 283:93-96 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect