Effects of 200 keV argon ions irradiation on microstructural properties of titanium nitride films
| Autor: | Popović, M., Novaković, M., Šiljegović, M., Bibić, N. |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 May 2012 279:144-146 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect