Acoustic mode converters micromachined in silicon by proton beam writing
Autor: | Scholz, U., Menzel, F., Pluta, M., Grill, W., Butz, T. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 October 2011 269(20):2452-2456 |
Databáze: | ScienceDirect |
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