Rapid and direct micro-machining/patterning of polymer materials by oxygen MeV ion beam irradiation through masks
| Autor: | Brun, S., Guibert, G., Meunier, C., Guibert, E., Keppner, H., Mikhailov, S. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 October 2011 269(20):2422-2426 |
| Databáze: | ScienceDirect |
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