Materials modifications using a multi-ion beam processing and lithography system
| Autor: | Appleton, Bill R., Tongay, S., Lemaitre, M., Gila, Brent, Fridmann, Joel, Mazarov, Paul, Sanabia, Jason E., Bauerdick, S., Bruchhaus, Lars, Mimura, Ryo, Jede, Ralf |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2012 272:153-157 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect