Assessment of approximations for efficient topography simulation of ion beam processes: 10 keV Ar on Si
| Autor: | Ebm, Christoph, Hobler, Gerhard |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 15 September 2009 267(18):2987-2990 |
| Databáze: | ScienceDirect |
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