Low temperature formation of luminescent Si nanocrystals with combined process of excimer UV-light irradiation and RTA
| Autor: | Iwayama, T.S., Fukaya, S., Watanabe, H., Hama, T., Hole, D.E. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 May 2009 267(8-9):1328-1331 |
| Databáze: | ScienceDirect |
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