Mechanisms of ion-induced GaN thin layer splitting
| Autor: | Moutanabbir, O., Chabal, Y.J., Chicoine, M., Christiansen, S., Krause-Rehberg, R., Schiettekatte, F., Scholz, R., Seitz, O., Senz, S., Süßkraut, F., Gösele, U. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1 May 2009 267(8-9):1264-1268 |
| Databáze: | ScienceDirect |
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