Wedge etching by anodic oxidation and determination of shallow boron profile by ion beam analysis
| Autor: | Gyulai, J., Battistig, G., Lohner, T., Hajnal, Z. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B April 2008 266(8):1434-1438 |
| Databáze: | ScienceDirect |
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