A simple model for quantifying the degree of layer-by-layer growth in low energy ion deposition of thin films
| Autor: | Huhtamäki, T., Jahma, M.O., Koponen, I.T. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B November 2007 264(1):55-60 |
| Databáze: | ScienceDirect |
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