Vacancy engineering for ultra-shallow junction formation
| Autor: | Gwilliam, R., Cowern, N.E.B., Colombeau, B., Sealy, B., Smith, A.J. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2007 261(1-2):600-603 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect