Solid-state microwave annealing of ion-implanted 4H–SiC
Autor: | Sundaresan, Siddarth G., Tian, Yong-lai, Ridgway, Mark C., Mahadik, Nadeemullah A., Qadri, Syed B., Rao, Mulpuri V. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2007 261(1-2):616-619 |
Databáze: | ScienceDirect |
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