Maskless proton beam writing in gallium arsenide
| Autor: | Mistry, P., Gomez-Morilla, I., Smith, R.C., Thomson, D., Grime, G.W., Webb, R.P., Gwilliam, R., Jeynes, C., Cansell, A., Merchant, M., Kirkby, K.J. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2007 260(1):437-441 |
| Databáze: | ScienceDirect |
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