Quantitative determination of depth carrier profiles in ion-implanted Gallium Nitride

Autor: Iucolano, F., Giannazzo, F., Roccaforte, F., Romano, L., Grimaldi, M.G., Raineri, V.
Zdroj: In Nuclear Inst. and Methods in Physics Research, B April 2007 257(1-2):336-339
Databáze: ScienceDirect