Epitaxial recrystallization of amorphous Si layers by swift heavy ions
| Autor: | Sahoo, P.K., Mohanty, T., Kanjilal, D., Pradhan, A., Kulkarni, V.N. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B April 2007 257(1-2):244-248 |
| Databáze: | ScienceDirect |
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