SIMS depth profile study using metal cluster complex ion bombardment
| Autor: | Tomita, M., Kinno, T., Koike, M., Tanaka, H., Takeno, S., Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Fujimoto, T., Kurokawa, A., Ichimura, S. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B May 2007 258(1):242-245 |
| Databáze: | ScienceDirect |
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