A quantitative stress-related model for the evolution of the pore size in porous silicon during high temperature annealing

Autor: Hassan, Moustafa M., Ghannam, Moustafa Y., Poortmans, Jef, Mertens, Robert
Zdroj: In Nuclear Inst. and Methods in Physics Research, B December 2006 253(1-2):269-273
Databáze: ScienceDirect