Structural and nuclear characterizations of defects created by noble gas implantation in silicon oxide
| Autor: | Assaf, H., Ntsoenzok, E., Barthe, M.-F., Ruault, M.-O., Sauvage, T., Ashok, S. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B December 2006 253(1-2):222-226 |
| Databáze: | ScienceDirect |
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