Study of SiO2 surface sputtering by a 250–550 keV He+ ion beam during high-resolution Rutherford backscattering measurements
| Autor: | Kusanagi, Susumu ⁎, Kobayashi, Hajime |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2006 249(1-2):421-424 |
| Databáze: | ScienceDirect |
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