Exploiting the third dimension in nanofabrication technology with scanned high energy ion beams
| Autor: | Martín y Marero, David, Enguita, Olga, Zubiri, Javier G., Rodríguez, Antonio, Narros, Jaime, Boerma, Dirk O. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2006 249(1-2):253-256 |
| Databáze: | ScienceDirect |
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