Improvement of nitrogen incorporation into oxynitrides on 4H-SiC(0 0 0 1)
| Autor: | Hoffmann, P., Schmeißer, D. |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B May 2006 246(1):85-89 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hoffmann, P., Schmeißer, D. |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B May 2006 246(1):85-89 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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