[formula omitted] ion implantation in strained-Si/SiGe/Si hetero-structures
| Autor: | Morioka, J., Irieda, S., Ishidoya, Y., Inada, T., Sugii, N. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B January 2006 242(1-2):630-632 |
| Databáze: | ScienceDirect |
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