Ion beam current dependence of compositions and resistivities on titanium nitride films deposited onto silicon by an ion beam assisted deposition method
| Autor: | Yokota, Katsuhiro, Kasuya, Tomohiko, Nakamura, Kazuhiro, Ohnishi, Masami, Miyashita, Fumiyoshi |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B January 2006 242(1-2):390-392 |
| Databáze: | ScienceDirect |
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