Dot-array implantation for patterned doping of semiconductors
| Autor: | Wanzenboeck, H.D. ⁎, Ostermaier, C., Gruen, A., Eichinger, B., Karner, M., Bertagnolli, E. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B January 2006 242(1-2):257-260 |
| Databáze: | ScienceDirect |
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