High energy focused ion beam lithography using P-beam writing
| Autor: | Glass, Gary A., Rout, Bibhudutta, Dymnikov, Alexander D., Greco, Richard R., Kamal, Mithun, Reinhardt, James R., Peeples, John A. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B December 2005 241(1-4):397-401 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect