Damage annealing process in implanted poly-silicon studied by nanocalorimetry: Effects of heating rate and beam flux
Autor: | Karmouch, R., Mercure, J.-F., Anahory, Y., Schiettekatte, F. |
---|---|
Zdroj: | In Nuclear Inst. and Methods in Physics Research, B December 2005 241(1-4):341-345 |
Databáze: | ScienceDirect |
Externí odkaz: |