Damage annealing process in implanted poly-silicon studied by nanocalorimetry: Effects of heating rate and beam flux
| Autor: | Karmouch, R., Mercure, J.-F., Anahory, Y., Schiettekatte, F. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B December 2005 241(1-4):341-345 |
| Databáze: | ScienceDirect |
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